23.03.09

Equipment that can quickly detect defects by inspecting semiconductor and display material components in three dimensions (D) has been developed.

SD OPTICS (SD OPTICS) has released a 3D line scanner that performs 3D inspection in real time.The scanner utilizes the "High-Speed Variable Focus Device (MALS)" technology developed independently by SD Optics and supplied to the German Zeiss electron microscope. It is possible to quickly inspect a subject with a height (step) and obtain a high-definition 3D image.

Typical 3D scanners are divided into area (area) inspection and line inspection methods. When looking closely at narrow areas, area inspection is performed, and line inspection is performed for inspection of semiconductor chips and display panels. Line inspection is a method of moving the inspection line to scan the entire object, similar to a copier moving a light line and scanning it.

Line inspection is easy to obtain a 2D (2D) image, but 3D image acquisition has high technical difficulty.  This is because the focus of the scanner camera lens needs to be readjusted due to different subject heights. Whenever the inspection line moves, the focus must be renewed. There are 3D line scanners that can be scanned with some automatic focus, but it takes a long time and the image is not clear because an actuator or motor is used to move the lens. Even this depends on foreign products.

SD Optics solved this problem with a high-speed variable focus element. An element is a kind of digital lens. It is made of micro-precision mechanical technology (MEMS) and is smaller than 1cm, but contains 8,000 ultra-fine mirrors inside.  It moves ultra-fine mirrors through voltage and controls the angle of light to focus in real time.It is similar to focusing the lens of the human eye with a different shape. SD Optics is the only company that has secured this technology.

Using a high-speed variable focus element, it is possible to automatically focus according to the height of the subject when the inspection line of the 3D line scanner moves. It obtains 3D images in real time according to the speed of movement of the inspection line. By utilizing 3D inspection software developed by SD Optics, various data such as subject height can also be quantified.

SD Optics is set to supply 3D line scanners.  Currently, it is discussing with customers to apply it to semiconductor, display, and PCB inspection lines.

Seo Chung-soo the CEO of SD Optics said, "The speed of inspecting semiconductor wafers and display panels is so fast that not only samples but also full inspection is possible," adding, "We plan to diversify our product portfolio using high-speed variable focus devices such as 3D line scanners."

<SD Optics has released a 3D line scanner that performs 3D inspection of semiconductor and display material parts in real time. It is possible to quickly inspect a subject with a height and obtain a high-definition 3D image. Researchers are inspecting parts with 3D line scanners at SDIoptics in Hwaseong, Gyeonggi Province, on the 23rd.Hwaseong = Reporter Park Ji-ho jihopress@etnews.com>
Issued Date: 2023.02.26   News URL: https://www.etnews.com/20230224000046 WiseTopo Hompage URL: www.wisetopo.com SD Optics Youtube URL: https://www.youtube.com/@sdoptics

23.03.09

  Application of ultra-high varifocal lens technology
Emerging as an alternative to expensive 3D microscopes
Releasing this month at Photonics West     A Korean company has developed an optical module that converts a two-dimensional (2D) microscope into a three-dimensional (3D) microscope. Regardless of the model, by just attaching the module, it will convert them into 3D. It is attracting attention as an alternative to expensive 3D microscopes ranging from tens of thousands KRW to hundreds of millions KRW.

SD OPTICS announced on the 26th that they have developed 'WiseTopo', a 3D digital optical module using MEMS-based lenses.

This product is characterized by overcoming the limitations of 2D microscopes with fixed focus which can used by mounting a module instead of an existing microscope image sensor.

The range recognized as being in focus during shooting is called depth of field (DoF), and 2D microscopes have very limited DoF. The plane can be seen from above, but the exact shape or height change of the object cannot be easily detected. Solving this problem requires refocusing manually or with a Z-axis (height) motor, which is inconvenient and less productive.     <2D microscope image (left) and 3D image with WiseTopo (right). It is focused clearly even with the difference in height.>     The key to SD OPTICS module is to overcome these limitations with their own 'ultra-high-speed varifocal' lens technology. The varifocal lens applied to the module contains thousands of micromirrors. Each micro-mirror moves at a high speed and focuses without any separate Z-axis movement. Through this, 3D images and various data can be extracted. The SD OPTICS variable focus lens has also been applied to the digital 3D microscope (Visioner 1) of Carl Zeiss, a world-renowned optical company.

SD OPTICS products also adopted 'C-mount' as a fixed mount standard required when removing the existing microscope image sensor and mounting the module, enhancing versatility.  Since many microscopes adopt this standard, SD OPTICS products can be used regardless of the brand model.
In addition, they provide functions including △Depth of field expansion function △Real-time 'all-in-focus' that focuses in all areas △'Fast auto focus' that automatically focuses on the desired area △Real-time 'multi-focus lock' function that maintains focus even when the sample is moved.   <3D image shape made from using WiseTopo>     With the high-speed 3D scan function, users can see the object as a more intuitive 3D shape image. Real-time comparison with existing designed 3D data is also possible by using software (SW) independently developed by SD OPTICS. Various 3D functions can be linked with virtual reality (VR) and augmented reality (AR) devices, enhancing user convenience.

SD OPTICS plans to unveil their products at the world's largest optics exhibition 'Photonics West 2023' to be held at the end of this month and begin to target the market in earnest. Demand for 3D replacement of existing 2D microscopes is the target. As of last year, the optical microscope market was estimated at 2.6 billion USD (about 3.2 trillion KRW). Among them, 2D microscopes account for more than 70%.

SD OPTICS’ Vice President Kyung-Suk Jeong said, “It is an innovative technology that can evolve existing 2D microscopes into high-priced 3D microscopes, and we are proud to build the foundation for popularization of 3D microscopes. We plan to upgrade performance and functions so that we can target the bio microscope market in the future.”   By Reporter Dong-jun Kwon     Issued Date: 2023.01.26   News URL: https://www.etnews.com/20230126000169 WiseTopo Hompage URL: www.wisetopo.com SD Optics Youtube URL: https://www.youtube.com/@sdoptics  

22.12.02

SD Optics will particiapte in Photonics West 2023 at Moscone Center in San Francisco, CA, USA for (2023/1/31 ~ 2023/2/3). Visitors are welcomed to join us at booth #4128.