25.03.06

▲ SD Optics’ semiconductor glass substrate TGV inspection solution ‘TGV Vision Master’ inspecting a sample. A technology has emerged that can fully inspect ‘Through Glass Via (TGV)’, which is considered the most difficult process in semiconductor glass substrate manufacturing. As the introduction of glass substrates in the semiconductor industry is promoted, solutions for commercialization are being developed one after another. SD Optics announced on the 5th that it has developed ‘TGV Vision Master’, which can fully inspect TGVs using a 3D line scanner. TGVs are passages that transmit electric signals by drilling holes tens of micrometers (㎛) in size into a glass substrate and filling them with metals such as copper. In order for TGVs to function properly, the size and spacing of the holes must be uniform. In particular, there must be no deviation in the diameters of the upper and lower holes to ensure reliability. SD Optics has developed a technology to measure TGV holes in real time as a 3D shape using an optical scanner positioned vertically and diagonally on a glass substrate. The concept is to directly measure the upper and lower surfaces and inner diameter of the hole to determine whether the TGV process was performed properly. The company explained that it can precisely analyze the round shape of the hole, taper angle, and upper and lower hole position deviation, immediately identify minute deviations in the process, and manage the quality of semiconductor glass substrates through this. ▲ SD Optics inspection image. The outer diameter, inner diameter, positional accuracy, and roundness of the TGV holeson a semiconductor glass substrate were measured (Photo = SD Optics)  This type of inspection requires an optical scanner to quickly change focus, and SD Optics utilized its patented MALS technology. With MEMS technology, the MALS lens has approximately 8,000 micro mirrors inside that control the angle of light and focus in real time. This is the technology that SD Optics also supplied to the world-class optical company Carl Zeiss Germany. With this technology, SD Optics’ TGV Vision Master has achieved a scanning speed of 40mm per second. The inspection speed was an obstacle that prevented the full inspection of semiconductor glass substrates, but the company has made it possible to quickly inspect even 510mm x 515mm semiconductor glass substrates, making full inspection possible. The company also explained that it can simultaneously detect defect images such as cracks or chipping on the upper, middle, and lower surfaces of the TGV hole. Such cracks are a factor that causes semiconductor glass substrates to break due to heat and pressure during the post-process. Detecting such defects at the early stage of process helps improving the manufacturing yield. A company official said, “The repeat accuracy is at the level of 0.25㎛, which is higher than the 0.3㎛ required by the industry.” In addition, TGV Vision Master also provides an inspection function after cutting the glass substrate. The semiconductor glass substrate is cut into individual units after the Ajinomoto Build-up Film (ABF) process, an insulating film. TGV Vision Master can identify the size, thickness, substrate step, and defects of individual units after this singulation process. SD Optics will supply new solutions to customers in cooperation with Philoptics Co, Ltd., a semiconductor glass substrate processing equipment company. Philoptics plans to manufacture a turn-key inspection equipment and supply to semiconductor glass substrate manufacturers. It has secured one customer and is currently discussing a contract with global semiconductor glass substrate manufacturers. Mr. Kyoung Seok Jung, Vice President and Chief Strategy Officer (CSO) of SD Optics, emphasized, “This is the first comprehensive inspection system to be applied to actual semiconductor glass substrate production lines, providing higher efficiency and precision than existing individual inspection methods,” and “It will contribute to improving the quality of glass substrate processes and enhancing productivity.”  Issue Date: March 6, 2025News URL: https://www.etnews.com/20250305000109 

24.12.11

SD Optics 是一家专注于光学领域的企业，致力于核心技术（MALS™）的持续研发和应用扩展，提供专业的视觉检测解决方案。 响应客户需求，我司近期推出了一款新品 WiseScope Vx200 光学模组。  WiseScope Vx200 光学模组集成了 MALS™(Micromirror Array Lens System) 技术，提供视觉检测所需的基本功能。 包括实时 EDoF(Extended Depth of Field / 超景深)、All In Focus 全景对焦 2D/3D 成像、多焦点设置、焦点锁定、3D 量测功能、 能够获取更为直观的深度信息，以及剖面图在内的 3D 图像数据。特别是 WiseScope Vx200 可通过物镜转换旋座（nosepiece）兼容多种物镜，方便用户根据检查需求自由切换倍率。此外，结合一个固定倍率物镜时，可以作为独立的 3D 显微镜用于视觉检测，也可以根据需求组装到检测设备中使用。  WiseScope Vx200 光学模组的功能包括：  - 采用了 MALS™(Micromirror Array Lens System) 超高速变焦技术 - 通过 MALS™ 技术实现 EDoF（超景深）以及 3D 成像 - 可自由切换不同倍率，提供便捷性和灵活性 - 可获取实时 3D 数据和深度图 - 自动对焦、多点对焦和全景对焦功能 - 针对特定检测区域（ROI）进行自动对焦和焦点锁定 - 采用了优化后的最适照明系统 - 融合校准算法可获取更为准确的 3D 测量数据 - 结合特定物镜，可作为独立的 3D 显微镜使用 SD Optics 将持续提高核心技术竞争力，力求为客户提供最佳光学解决方案。 

23.03.09

Equipment that can quickly detect defects by inspecting semiconductor and display material components in three dimensions (D) has been developed.

SD OPTICS (SD OPTICS) has released a 3D line scanner that performs 3D inspection in real time.The scanner utilizes the "High-Speed Variable Focus Device (MALS)" technology developed independently by SD Optics and supplied to the German Zeiss electron microscope. It is possible to quickly inspect a subject with a height (step) and obtain a high-definition 3D image.

Typical 3D scanners are divided into area (area) inspection and line inspection methods. When looking closely at narrow areas, area inspection is performed, and line inspection is performed for inspection of semiconductor chips and display panels. Line inspection is a method of moving the inspection line to scan the entire object, similar to a copier moving a light line and scanning it.

Line inspection is easy to obtain a 2D (2D) image, but 3D image acquisition has high technical difficulty.  This is because the focus of the scanner camera lens needs to be readjusted due to different subject heights. Whenever the inspection line moves, the focus must be renewed. There are 3D line scanners that can be scanned with some automatic focus, but it takes a long time and the image is not clear because an actuator or motor is used to move the lens. Even this depends on foreign products.

SD Optics solved this problem with a high-speed variable focus element. An element is a kind of digital lens. It is made of micro-precision mechanical technology (MEMS) and is smaller than 1cm, but contains 8,000 ultra-fine mirrors inside.  It moves ultra-fine mirrors through voltage and controls the angle of light to focus in real time.It is similar to focusing the lens of the human eye with a different shape. SD Optics is the only company that has secured this technology.

Using a high-speed variable focus element, it is possible to automatically focus according to the height of the subject when the inspection line of the 3D line scanner moves. It obtains 3D images in real time according to the speed of movement of the inspection line. By utilizing 3D inspection software developed by SD Optics, various data such as subject height can also be quantified.

SD Optics is set to supply 3D line scanners.  Currently, it is discussing with customers to apply it to semiconductor, display, and PCB inspection lines.

Seo Chung-soo the CEO of SD Optics said, "The speed of inspecting semiconductor wafers and display panels is so fast that not only samples but also full inspection is possible," adding, "We plan to diversify our product portfolio using high-speed variable focus devices such as 3D line scanners."

<SD Optics has released a 3D line scanner that performs 3D inspection of semiconductor and display material parts in real time. It is possible to quickly inspect a subject with a height and obtain a high-definition 3D image. Researchers are inspecting parts with 3D line scanners at SDIoptics in Hwaseong, Gyeonggi Province, on the 23rd.Hwaseong = Reporter Park Ji-ho jihopress@etnews.com>
Issued Date: 2023.02.26   News URL: https://www.etnews.com/20230224000046 WiseTopo Hompage URL: www.wisetopo.com SD Optics Youtube URL: https://www.youtube.com/@sdoptics