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Confocal AF Module

SD Optics’ Confocal AF Module is the world’s first breakthrough solution,
seamlessly integrating ultra-high-speed variable focus technology with a
Through-the-Lens (TTL) confocal optical system.

By aligning inspection and height measurement on a single optical axis,
it delivers real-time Z-axis displacement (ΔZ) measurement with fast, precise autofocus.

With support for Extended Depth of Focus (EDoF) imaging,
it unlocks powerful image-based 3D measurement capabilities.

Engineered for performance and precision, the Confocal AF Module sets a new standard for
high-precision inspection and metrology applications.

SD Optics’ Confocal AF Module is the world’s first breakthrough solution,
seamlessly integrating ultra-high-speed variable focus technology with a
Through-the-Lens (TTL) confocal optical system.

By aligning inspection and height measurement on a single optical axis,
it delivers real-time Z-axis displacement (ΔZ) measurement with fast, precise autofocus.

With support for Extended Depth of Focus (EDoF) imaging,
it unlocks powerful image-based 3D measurement capabilities.

Engineered for performance and precision, the Confocal AF Module sets a new standard for
high-precision inspection and metrology applications.

Product Configuration & Feature

Through-the-Lens (TTL) confocal system
On-axis ΔZ measurement
No mechanical Z-axis movement
Suitable for high-grade cleanroom environments (i.e. semiconductor)
High repeatability and reliability
Auto focus & EDoF imaging
Image-based 3D shape measurement
Precise warpage correction
On-the-Fly (OTF) inspection

Applications

1) Inspection of Severely Warped Wafers (e.g., Fan-Out Wafers)
→ On-axis focus tracking for on-the-fly inspection

2) Fan-Out Wafer-Level Packaging (FOWLP) and Panel-Level Packaging (PLP) Inspection
→ Supports on-the-fly inspection

3) Glass Substrate Inspection
→ Detection of via hole micro-cracks and surface defects
→ High-accuracy dimensional measurement with warpage focus tracking and EDoF

Application 1

DISPLAY PANEL PARTICAL MEASUREMENT

Particles within transparent layers, which appear overlapped or blurred, making accurate height measurement difficult  precise measurement is achievable with Confocal AF Module

Application 2

EUV PELLICLE INSPECTION

Accurate inspection of EUV Pellicle even when micro-vibration or sagging of ultra-thin pellicles exceeds the optical system’s depth of field

Confocal AF Module – Key Benefits

Real-Time Focus Tracking: Instant, on-axis Z-axis measurement
Precision 3D Imaging: EDoF-powered, image-based 3D measurement
Distortion-Free Stability: True on-axis confocal design for reliable results

Product Specification

	Magnification		10x	20x	50x
WiseScope	FOV (mm × mm)		0.84 × 0.71	0.42 × 0.36	0.168 × 0.144
	Working Distance (mm)		34mm	20mm	13mm
	DOF (μm)		7μm	3.1μm	1.8um
	Depth Resolution (μm)		1.23um	0.26um	0.047um
	Scan Range (μm)		390um	250um	30um
Confocal Autofocus Sensor	Laser source	Type	Laser Diode
	Laser source	Spec.	660 nm / 120 mW
	Repeatability (μm)		0.81	0.22	0.02	0.15
	Measurement Range (μm)		764.0	176.0	20.0	40.0
	Measurement Time (ms) *	Full-Range	60	30.0	5.3	11.5
	Measurement Time (ms) *	10% of Range	6.0	3.0	0.5	1.2
Notes	* Measurement time : Based on ½ DOF, operating cycle 4 kHz