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SD Optics provides semiconductor vision inspection solutions designed to detect and measure a wide range of defects that occur during manufacturing processes. Our customized optical solutions and inspection algorithms are developed to rapidly identify various types of defects in full inspection, such as semiconductor fabrication processes. In addition, we offer advanced analysis tools to enhance productivity and improve yield.
SD Optics provides semiconductor vision inspection solutions designed to detect and measure a wide range of defects that occur during manufacturing processes. Our customized optical solutions and inspection algorithms are developed to rapidly identify various types of defects in full inspection, such as semiconductor fabrication processes. In addition, we offer advanced analysis tools to enhance productivity and improve yield.
| Target | Scope | Inspection Items |
|---|---|---|
Probe
|
MEMS Probe Pin Probe |
Customized inspection upon request Inspection examples: : Size Alignment Defects Particles Planarity Crack Chipping, etc. |
Process
|
Bare Wafer, Packaging, Wire Bonding, Photo Mask, EUV Pellicle, Photo Nozzle |
|
TGV
|
MEMS Probe Pin Probe |
|
Solder Ball
|
Solder Ball AVI |
Automation of manual inspection for over 20,000 probe pins
- Inspection items: tip size, alignment, particle defection, etc.
Inspection of Wafer surface particle, scratch, edge, notch, etc.
Improved efficiency through inspection automation, with high-resolution imaging enabling intuitive defect detection
Preventive inspection and maintenance of each component to ensure stable process conditions and consistent wafer quality
Product Configuration & Feature
- High-magnification analysis support
- Built-in inspection algorithms
- Inspection and metrology data management software provided
- Customizable solutions available
Supply type: module or full system
Custom specifications: inspection areas, items, etc.
Product Configuration & Feature
- High-magnification analysis support
- Built-in inspection algorithms
- Inspection and metrology data management software provided
- Customizable solutions available
Supply type: module or full system
Custom specifications: inspection areas, items, etc.
Product Configuration & Feature
- High-magnification analysis support
- Built-in inspection algorithms
- Inspection and metrology data management software provided
- Customizable solutions available
Supply type: module or full system
Custom specifications: inspection areas, items, etc.
Product Configuration & Feature
- High-magnification analysis support
- Built-in inspection algorithms
- Inspection and metrology data management software provided
- Customizable solutions available
Supply type: module or full system
Custom specifications: inspection areas, items, etc.
※ Example image: Solder Ball Vision Inspection System
Product Configuration & Feature
- Defect before and after wire bonding
- Bumped ball size, ball interval, ball~edge interval length, scratch, chipping, etc
- Defect Marking / Mapping
SD Optics’ TGV vision inspection system integrates a 3D line scanner equipped with the ultra-high-speed variable focus lens MALS™, enabling real-time, intuitive inspection in high-volume, 100% inspection processes such as TGV manufacturing.
SD Optics’ TGV vision inspection system integrates a 3D line scanner equipped with the ultra-high-speed variable focus lens MALS™, enabling real-time, intuitive inspection in high-volume, 100% inspection processes such as TGV manufacturing.
Product Configuration & Feature
- Compatible with a wide range of laser characteristics
(not limited to laser power or type)
- Via geometry inspection (diameter, roundness, inner surface)
- Via position accuracy inspection (alignment, pitch, etc.)
- Surface damage and particle detection
Product Configuration & Feature
- Customized inspection based on wafer characteristics
(size, thickness, hole size, pitch, etc.)
- Top / Middle / Bottom measurement
- 3D measurement with no depth limitation
- High-precision data acquisition
(repeatability < 0.5 μm / 0.25 μm)
- Simple optical inspection system
- Excellent expandability ( 2 Step , 3 Step , .. N Step)
Product Configuration & Feature
- High-speed inspection enabled by line scan camera
- Real-time 3D image generation for intuitive inspection
- Built-in inspection algorithms
- Data management software provided
- Precision measuring defects in the interlayer of flat or curved display
| Items | Spec | Remark |
|---|---|---|
| WS Magnification | 7.5 x | |
| FOV (mm) | 2.3 x 2.2 | |
| Scanning Depth | 0.688mm | |
| Depth Resolution | 2.15um | |
| Accuracy | ± 5um | Scanning range 1.45mm |
| Measuring T/T | 84 sec / 120 cut |
Material(defect) transparency
Defect on Curved Surface
- Detection of micro crack on the flat and curved display
| Items | Spec | Remark |
|---|---|---|
| WS Magnification | 2.3 x | |
| FOV (mm) | 5.5 x 5.5 | |
| Scanning Depth | 4.9mm | |
| Depth Resolution | 15.5um | |
| Accuracy | ± 6um | Scanning range 1.45mm |
| Measuring T/T | - | Depends on the required insp. spec |
Detection of the crack on the curved surface
SD Optics provides precision inspection system required in each process of manufacturing camera modules.From single lens inspection to camera module finished production,We have optimum solution to each process inspection and its requirements.
SD Optics provides precision inspection system required in each process of manufacturing cameramodules. From single lens inspection to camera module finished production,We have optimum solution to each process inspection and its requirements.
| System | Inspection Area | Status |
|---|---|---|
| Single Lens Inspection System | Lens top, bottom side inspection | In Production |
| Lens Barrel Inspection System | Lens barrel top, bottom side inspection | In Production |
| Lens Ass’y Inspection System | Lens ass’y each lens top, bottom side inspection Lens barrel top, bottom, side surface inspection Iris and flare inspection | In Production |
| Lens Flare Inspection System | ||
| VCM-Lean Ass’y Inspection system | IR filter top, bottom side inspection (AR/IR) Outer surface of the last lens inspection | In Production |
| IR Attach-VCM Ass’y Inspection System | Outer surface of the IR Filter top and bottom side inspection afterVCM and IR filter assembly | In Production |
| System | Inspection Area | Status |
|---|---|---|
| Image Sensor Inspection System | Effective area of image sensor inspection | In Production |
| IR Attached Image Sensor Inspection System | Effective area of image sensor and IR filter top and bottom side inspection | In Production |
| System | Inspection Area | Status |
|---|---|---|
| Camera Module 6-side Inspection System | 6-surface of the camera module and FPCB | In Production |
Lens & Ass’y
Digital Optic Koren CNO Bangjoo Sekonix N2A Haesung JAESUNG
Lens Ass’y + IR
Attach & VCM
UBIS Bangjoo Haesung Mir Cam IM Jahwa Hisonic Optron
Camera Module
Foxconn SEMCO SEC LGIT Patron CAMSYS MCNEX Nanos NAMUGA Cowell CRESIN HNT
Mobile
SEC LG Apple ZTE HTC
- Non-automated microscope
- Worker’s visual inspection
- Focus controlled manually by workers
- Different result by workers
- No automated vari-focus technology
- Workers’ condition causes inaccuracy and
poor repeatability
→ High overkill and underkill
- 3 shifts/day causes labor cost increase
- Poor productivity due to many overkill
- Underkill causes post-processing cost increase
- Impossible to set and maintain a clear
inspection criteria
- Limit of inspection result documentation
- Insufficient experienced worker
- High turnover due to difficult work condition
- Vari-Focus vision basis
- Automation algorithm
- Automated interlayer analysis
- Result of interlayer analysis
- Excellent repeatability due to automation
- Different defect criteria by inspection field
- Detection of micron defect such as stain, etc.
- Production increase using auto inspection
- Minimize overkill using optimized algorithm
- Save post-processing cost by controlling underkill
- Inspection standardization
- One step inspection and defect analysis
- Inspection result database
- Production control by defect type
- Several machines control per person
Inspection
Method
Interlayer
Analysis
Inspection
Result
Productivity
Difference
- Lens top/bottom side inspection- Particle, black/white dot, bubble, scratch, contamination, coating error inspection- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≤ 12um | Base on short side of defect |
| Detect defection type |
Particle, Black dot, White dot, Bubble, Scratch, Contamination, Coating error |
Inspection area : Lens top/bottom |
| Underkill | ≤ 0.5% | - Base on mass production product 2,000ea |
| Overkill | ≤ 2% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | 97% | - Not including less than 30 gray value defect |
| Cycle Time | 0.35 sec/ea. | - 180ea products/tray, Magazine to Magazine |
| Vision System | Top : 4M x 2 sets, Bottom : 4M x 2 sets | Option: Color camera, Dual Magazine |
| Pixel resolution | 6.1um | |
| FOV | 12mm x 12mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Marking | |
| Tray loading | 20 coating trays/magazine |
- Lens top/bottom side, Barrel inspection- Particle, black/white dot, bubble, scratch, contamination, coating error inspection- Auto NG Sorting system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≤ 12um | Base on short side of defect |
| Detect defection type |
Particle, Black dot, White dot, Bubble, Scratch, Contamination, Coating error,Barrel, and so on. |
Inspection area : Lens top/bottom, Barrel top/bottom(Option : Barrel Side) |
| Underkill | ≤ 1% | - Base on mass production product 2,000ea |
| Overkill | ≤ 6% | - Not including +1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 2.0 sec/ea. | - 100ea products/tray, Magazine to Magazine |
| Vision System | Top : 4M x 2 sets Bottom : 4M x 2 sets |
Option 1) Barrel Side Inspection vision 2. Iris inspection vision(Check assembled of not) Option 2) Iris inspection vision (check if assembled or not) |
| Pixel resolution | 6.1um | |
| FOV | 12mm x 12mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | 10 trays/magazine |
- Lens top/bottom/side/inside of lens ass’y barrel- Iris inside of lens ass’y- Lens flare inspection- Auto NG Sorting system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ||
| Detect defection type |
Flare | |
| Underkill | ≤ 0.6% | - Base on mass production product 2,000ea |
| Overkill | ≤ 6% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 2.3 sec/ea. | - 100ea products/tray, Magazine to Magazine |
| Vision System | Pre-focus vision 1 set | Pre-align vision system |
| Pixel resolution | Using customer’s Image sensor | |
| FOV | - | |
| Light | LED Array | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | 10 trays/magazine |
Customer Image
Results Image
- Barrel Top/Bottom/Side inspection, barrel inside inspection- Particle, dent, scratch, contamination, coating error- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | 20um | Base on short side of defect |
| Detect defection type |
Particle, Dent, Scratch, Conramination, Coating error |
Inspection area : Barrel Top/Bottom/Side, Barrel inside |
| Underkill | ≤ 1% | - Base on mass production product 2,000ea |
| Overkill | ≤ 6% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 2.0 sec/ea. | - 100ea products/tray, Magazine to Magazine |
| Vision System | Bottom : 2M x 1 set, Side : 2M x 1 set Inside : 2M x 1 set, Top : 4M x 2 sets (color) |
|
| Pixel resolution | 7.6um | |
| FOV | 14mm x 14mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | 10 trays/magazine |
- IR Filter top/bottom & Lens top side inspection- Particle, black dot, white dot, bubble, scratch, contamination, coating error, bonding error- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 15 um ≥ 15 um ≥ 30 um |
IR filter AR side IR filter AR side Lens top side |
| Detect defection type |
Particle, Black dot, White dot, Bubble, Scratch, Contamination, Coating error, Bonding error |
Inspection area : IR Filter Top/Bottom & Lens top side |
| Underkill | ≤ 0.2% | - Base on mass production product 2,000ea |
| Overkill | ≤ 8% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 0.9 sec/ea. | - Base on dual line concept |
| Vision System | 4M x 1 set | |
| Pixel resolution | 6.1um | |
| FOV | 12mm x 12mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | 5 trays/magazine |
- Effective area of image sensor inspection- Particle, contamination- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 1 um | |
| Detect defection type |
Particle, contamination | Image sensor effective area |
| Underkill | ≤ 0.5% | - Base on mass production product 2,000ea |
| Overkill | ≤ 2% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 97% | - Not including less than 30 gray value defect |
| Cycle Time | 1.5 sec/ea. | - Excluding the Loading/Unloading time by operator |
| Vision System | Top : 4M x 1 set | |
| Pixel resolution | 4.23um | |
| FOV | 10mm x 10mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Manual (Cleaning by operator) | Using 20x Microscope |
| Tray loading | 1 strip | Manual |
- Top side of camera module inspection- Particle, scratch, contamination, poron shift, FPCB, Connector- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 50 um ≥ 150 um |
Lens top Poron, FPCB, connector |
| Detect defection type |
Particle, Scratch, Contamination Poron shift, FPCB, Connector |
Inspection area : Module top side |
| Underkill | ≤ 0.25% | - Base on mass production product 2,000ea |
| Overkill | ≤ 5% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 97% | - Not including less than 30 gray value defect |
| Cycle Time | 2.5 sec/ea. | - Excluding the Loading/Unloading time by operator |
| Vision System | Module top side : 4M x 2 sets | |
| Pixel resolution | 6.1 um / 11.4 um | |
| FOV | 12.5 x 12.5 / 23.2 x 23.2 (mm) | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | 1 tray | Loading/Unloading by operator |
- 6-surface of the camera module top/side/bottom inspection- Particle, scratch, contamination, poron shift, FPCB, Connector stiffener- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 50 um ≥ 50 um |
Lens top side Poron, FPCB, connector |
| Detect defection type |
Particle, Scratch, Contamination Poron, FPCB, Connector stiffener |
Inspection area : Module top/ Side/Bottom |
| Underkill | ≤ 0.2% | - Base on mass production product 2,000ea |
| Overkill | ≤ 5% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 97% | - Not including less than 30 gray value defect |
| Cycle Time | 2.1 sec/ea. | - Base on Mass production product 5 LOTs (60 ea./Tray) |
| Vision System | 5M x 9 sets | Color camera |
| Pixel resolution | 3.8 um / 5.8 um | |
| FOV | 9.3 x 7.9 / 16.2 x 13.7 (mm) | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | Magazine |
Chipping on Barrel
Damages on Connector
Lens Scratch
Dent on Shield can
Lack of epoxy
- Bar type flash lens top/bottom side inspection- Particle, black dot, white dot, scratch, contamination- Auto NG sorting system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 30 um | Base on short side of defect |
| Detect defection type |
Particle, Black dot, White dot, Scratch, Contamination |
Inspection area : Lens Top, Bottom |
| Underkill | ≤ 0.5% | - Base on mass production product 2,000ea |
| Overkill | ≤ 2% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 97% | - Not including less than 30 gray value defect |
| Cycle Time | 1.2 sec/ea. | - 32ea products/tray - Dual line concept |
| Vision System | Top: 4M x 2 sets, Bottom: 4M x 2 sets | |
| Pixel resolution | 6.1 um | |
| FOV | 12mm x 12mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | Stack | 40 tray at once |
- Single type flash lens top/bottom and side inspection- Particle, black dot, white dot, scratch, contamination- Using the combination of multi illumination system
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≥ 30 um | Base on short side of defect |
| Detect defection type |
Particle, Black dot, White dot, Scratch, Contamination |
Inspection area : Lens Top, Bottom, Side |
| Underkill | ≤ 0.5% | - Base on mass production product 2,000ea |
| Overkill | ≤ 3% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 1.3 sec/ea. | - 60ea products/tray |
| Vision System | Top: 4M x 2 sets Bottom: 4M x 2 sets Side: 4M x 2 sets |
|
| Pixel resolution | 6.1 um | |
| FOV | 12mm x 12mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | Stack | 40 tray at once |
- VR/AR lens top/bottom and side inspection- Particle, black dot, white dot, bubble, scratch, contamination- Using the combination of multi illumination system- Auto NG sorting
| Items | SD Optics | Remark |
|---|---|---|
| Min. Defect size | ≤ 50um | |
| Detect defection type |
Particle, Black dot, White dot, Bubble, Scratch, Contamination |
Inspection area : Lens top/bottom |
| Underkill | ≤ 0.5% | - Base on mass production product 2,000ea |
| Overkill | ≤ 3% | - Not including ±1 pixel size deviation, secondary contamination, Visual inspector error |
| Repeatability | ≥ 95% | - Not including less than 30 gray value defect |
| Cycle Time | 4sec/ea | - 1 lens/tray |
| Vision System | Top : 25M x 2 sets, Bottom : 25M x 1 sets | |
| Pixel resolution | 13.1um | |
| FOV | 60mm x 60mm | |
| Light | Multi-light system | Designed by SD OPTICS |
| NG product | Sorting | |
| Tray loading | Stack |
- Live 3D visual display - Auto-Focus, Multi focus, AIF Image function - SW package (Auto-measure, data management, create&edit, etc) - Lighting control for each illuminations
| Items | SD Optics | Remark |
|---|---|---|
| Stage moving range | 500 x 350 x 100 | XYZ, mm |
| WS Magnification | 1.3 x | |
| FOV (mm) | 8.5 x 8.5 | |
| Scanning Depth | 6.1 mm | |
| Depth Resolution | 19.2 um | |
| Accuracy | ± 10 um | |
| Illumination | 24 sector control system | SD in-house made |
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